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The present volume is essentially a qualitative survey of modern trends in the diagnostics of high-temperature plasmas, with particular orientation toward laboratory plasmas of interest in connection with research in controlled thermonuclear fusion. Among the broad topics considered are probe diagnostics, optical methods (including the use of lasers and holography), microwave diagnostics, and diagnostics with particle beams. Having infor mation on these methods available in compact form and in one place, as is the case in the present volume, should make it pos sible to evaluate different diagnostic approaches to specific prob lems. The volume will be useful as an introduction for advanced students making their first contact with experimental plasma physics and for physicists and engineers who are entering the field and desire a rapid survey of principles and modern trends in the diagnostics of high-temperature plasmas. v Foreword to the American Edition The material in this book is based on lectures given at Mos cow State University. It is intended to acquaint the reader with the basic aspects of plasma diagnostics and contains information re quired for the experimental physicist who wishes to carry out straightforward measurements of laboratory plasmas. It will be evident that in choosing the material we have been guided pri marily by the scientific interests of the author, and the great bulk of the material is based on work carried out in the USSR.

This book is planned to introduce the advances topics of plasma physics for research scholars and postgraduate students. This book deals with basic concepts in plasma physics, non-equilibrium plasma modeling, space plasma applications, and plasma diagnostics. It also provides an overview of the linear and nonlinear aspects of plasma physics. Chapters cover such topics as plasma application in space propulsion, microwave–plasma interaction, plasma antennas, solitary waves, and plasma diagnostic techniques.

This book of proceedings collects the papers presented at the Workshop on Diagnostics for ITER, held at Villa Monastero, Varenna (Italy), from August 28 to September 1, 1995. The Workshop was organised by the International School of Plasma Physics "Piero Caldirola. " Established in 1971, the ISPP has organised over fifty advanced courses and workshops on topics mainly related to plasma physics. In particular, courses and workshops on plasma diagnostics (previously held in 1975, 1978, 1982, 1986, and 1991) can be considered milestones in the history of this institution. Looking back at the proceedings of the previous meetings in Varenna, one can appreciate the rapid progress in the field of plasma diagnostics over the past 20 years. The 1995 workshop was co-organised by the Istituto di Fisica del Plasma of the National Research Council (CNR). In contrast to previous Varenna meetings on diagnostics, which have covered diagnostics in present-day tokamaks and which have had a substantial tutorial component, the 1995 workshop concentrated specifically on the problems and challenges of ITER diagnostics. ITER (the International Thennonuclear Experimental Reactor, a joint venture of Europe, Japan, Russia, and the United States, presently under design) will need to measure a wide range of plasma parameters in order to reach and sustain high levels of fusion power. A list of the measurement requirements together with the parameter ranges, target measurement resolutions, and accuracies provides the starting point for selecting a list of candidate diagnostic systems.

Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition conditions have to be found by carrying out experiments in a trial-and error fashion with varying parameters. The data obtained on one growth apparatus are often not transferable to another. This is especially true for film deposition processes using a cold plasma because of our poor under standing of the mechanisms. Relatively precise studies have been carried out on the role that physical effects play in film formation such as sputter deposition. However, there are many open questions regarding processes that involve chemical reactions, for example, reactive sputter deposition or plasma enhanced chemical vapor deposition. Much further research is re quired in order to understand the fundamental deposition processes. A sys tematic collection of basic data, some of which may be readily available in other branches of science, for example, reaction cross sections for gases with energetic electrons, is also required. The need for pfasma deposition techniques is felt strongly in industrial applications because these techniques are superior to traditional thin-film deposition techniques in many ways. In fact, plasma deposition techniques have developed rapidly in the semiconductor and electronics industries. Fields of possible application are still expanding. A reliable plasma reactor with an adequate in situ system for monitoring the deposition conditions and film properties must be developed to improve reproducibility and pro ductivity at the industrial level.

In this new book, an interdisciplinary and international team of experts provides an exploration of the emerging plasma science that is poised to make the plasma technology a reality in the manufacturing sector. The research presented here will stimulate new ideas, methods, and applications in the field of plasma science and nanotechnology. Plasma technology applications are being developed that could impact the global market for power, electronics, mineral, and other fuel commodities. Currently, plasma science is described as a revolutionary discipline in terms of its possible impact on industrial applications. It offers potential solutions to many problems using emerging techniques. In this book the authors provide a broad overview of recent trends in field plasma science and nanotechnology. Divided into several parts, Plasma and Fusion Science: From Fundamental Research to Technological Applications explores some basic plasma applications and research, space and atmospheric plasma, nuclear fusion, and laser plasma and industrial applications of plasma. A wide variety of cutting-edge topics are covered, including: • basic plasma physics • computer modeling for plasma • exotic plasma (including dusty plasma) • industrial plasma applications • laser plasma • nuclear fusion technology • plasma diagnostics • plasma processing • pulsed power • space astrophysical plasma • plasma and nanotechnology Pointing to current and possible future developments in plasma science and technology, the diverse research presented here will be valuable for researchers, scientists, industry professionals, and others involved in the revolutionary field of plasma and fusion science.

The present book contains the proceedings of the workshop "Plasma Technology and Applications" which was held at 11 Ciocco (Lucca-Italy) during 5-6 July 1991. The workshop was organized just before ICPIG XX to emphasize the role of plasma physics and plasma chemistry in different fields of technology. Topics cover different applications such as lamps, plasma treatment of materials (etching, deposition, nitriding), plasma sources (microwave excitation, negative ion sources) and plasma destruction of pollutants. Several chapters deal with basic concepts in plasma physics, non equilibrium plasma modeling and plasma diagnostics as well as with laser interaction with solid targets. The authors gratefully acknowledge the financial support provided by university of Bari (Italy) and by CNR (Centro di Studio per la Chimica dei Plasmi, Istituto di Fisica Atomica e Molecolare (IFAM) and Progetto Finalizzato Materiali Speciali per Tecnologie Avanzate) as well as the sponsorship of ENEA. M. Capitelli C. Gorse v CONTENTS Plasmas in nature, laboratory and technology 1 A.M. Ignatov and A.A. Rukhadze Laser diagnostics of plasmas 11 L. Pyatnitsky Probe diagnostics of plasmas 27 G. Dilecce Theory, properties and applications of non equilibrium plasmas created by external energy sources 45 E. Son Non-Equilibrium plasma modeling 59 M. Capitel1i, R. Celiberto, G. Capriati, C. Gorse and S. Longo Gas discharge lamps 81 M. Koedam Plasma etching processes and diagnostics 93 R. d'Agostino and F. Fracassi Plasma deposition: processes and diagnostics 109 A

This book is an outgrowth of courses in plasma physics which I have taught at Kiel University for many years. During this time I have tried to convince my students that plasmas as different as gas dicharges, fusion plasmas and space plasmas can be described in a uni ed way by simple models. The challenge in teaching plasma physics is its apparent complexity. The wealth of plasma phenomena found in so diverse elds makes it quite different from atomic physics, where atomic structure, spectral lines and chemical binding can all be derived from a single equation—the Schrödinger equation. I positively accept the variety of plasmas and refrain from subdividing plasma physics into the traditional, but arti cially separated elds, of hot, cold and space plasmas. This is why I like to confront my students, and the readers of this book, with examples from so many elds. By this approach, I believe, they will be able to become discoverers who can see the commonality between a falling apple and planetary motion. As an experimentalist, I am convinced that plasma physics can be best understood from a bottom-up approach with many illustrating examples that give the students con dence in their understanding of plasma processes. The theoretical framework of plasma physics can then be introduced in several steps of re nement. In the end, the student (or reader) will see that there is something like the Schrödinger equation, namely the Vlasov-Maxwell model of plasmas, from which nearly all phenomena in collisionless plasmas can be derived.